Zno-SiO_2-Si结构中压电薄膜C轴取向等参数对声表面波的影响

The effects of the c-axis orientation of the ZnO film and other parameters in ZnO-SiO_2-Si layered structure on SAW

当Zno－SiO2－Si结构中的Zno薄膜c轴取向偏离基片法向时，将对声表面波传播速度、机电耦合系数等参量产生影响，本文对此问题进行了理论分析和数值计算；同时还讨论了本结构中影响声表面波束偏的一些参数．

The important parameters of SAW devices, the SAW velocity and the me chanico-electrical coupling coefficient, will be affected by the c-axis orientation of ZnO film in a ZnO-SiO2-Si layered structure. In the present paper, the problem is studied the oretically. Moreover, beamsteering of SAW is also investigated for the layered structure.