摘要
本文介绍了应用导波光学技术测量“夹心”光学薄膜的特征参数的方法,并研究了比较简单的结构(由二、三层膜组成),检测到了高折射率薄膜的各向异性。从不同结构的膜系中的同类薄膜的比较中发现了单层膜与膜堆中对应的“夹心”膜之间在折射率和各向异性上的差别。
One method to measure the characteristic parameters of sandwiched thin films
by guided wave technique is given in the paper. For the structures up to two
or three layesr, the optical anisotropy can be detected. By comparison with a
single layer produced in the same conditions, a slight difference of the index
and anisotropy has been found.
出处
《光电工程》
CAS
CSCD
1990年第3期29-36,共8页
Opto-Electronic Engineering
关键词
光学薄膜
导波光学
测量
各向异性
Sandwich optical thin films, Anisotropy, Guided wave optical technique, Refractive index measurement, Thin film measurement