摘要
EFAB是一种新型的微机械加工技术,它旨在快速、批量、自动化加工复杂的三维高深宽比微金属结构,该技术是在实体自由成型制作技术上发展而来的。本文主要介绍EFAB加工技术的工艺流程、发展和主要特点,列举EFAB技术在微器件制作中的应用情况,并将该技术与其他微机械加工工艺进行了比较。
EFAB is a new method for micro-machine＇s fabrication, targeted at the rapid, automated batch fabrication of an unlimited variety of high aspect ratio metallic microstructures.EFAB is based on the technology of SFF.This paper describes the process, characters and development of EFAB,and presents its application in MEMS. The difference between EFAB and other micro-fabrication process is also given in this paper.
出处
《微计算机信息》
北大核心
2007年第01Z期257-259,209,共4页
Control & Automation
基金
武器装备预研基金资助项目(编号不公开)
