激光专用机在非晶硅太阳能电池制备中的应用

Application of the Laser Patterning Machine in the Fabrication of A-Si Solar Cells

本文详细讨论了大面积实用型非晶硅太阳能电池制备中激光刻蚀专用机的作用及对该机的技术要求.研究结果表明,采用10瓦YAG激光器并配以微机控制的x-y大型载物台,可用于20cm×20cm非晶硅太阳能电池的研究,已制出10cm×10cm转换效率可达8.55%的电池.

The application of the laser patterning machine and the requirement to it in the fab- rication of a-Si solar cells have been reported. Two kinds of YAG laser machines with 10watt output power and 22cm×22cm x-y work bench controlled by a computer havebeen made and applicated in study of a-Si solar cells. Using TJN-I type laser machineand a set of seperated consecutive reaction system we have prepared the a-Si solar celleswith 10×10cm^2area and in range of 7%-8% effeciency which the highest is 8.55%.