经验模式分解法在薄膜光谱研究中的应用

Application of Empirical Mode Decomposition in Film Spectroscopy Research

应用经验模式分解方法分析薄膜光谱,并且用该方法处理所得的薄膜反射干涉光谱曲线计算薄膜厚度,测量误差为1.51%.证明了经验模式分解方法在光谱信号处理过程中的可靠性.

A novel method called the empirical mode decomposition （EMD） in spectrum analysis is proposed. It is especially suitable for non-linear and non-stationary data. EMD is adaptive and there is no data losing in data processing. EMD method is used more and more extensively in fault diagnosis, but for spectroscopy researches it is only in an infant stage. In this paper an EMD approach to obtain the reflection interference spectrum of TiO2 film by method is discussed. And the thickness of this film can be calculated from its spectrum and the error is 1. 51%, which proved the reliability and feasibility of EMD in spectroscopy signal analysis.