ZnO压电薄膜声传感器的有限元分析

Finite element analysis of ZnO piezoelectric thin film acoustic sensor

阐述了ZnO压电薄膜声传感器的结构和工作原理,并用ANSYS 9.0对压电薄膜声传感器进行了静态分析、模态分析和谐响应分析。通过静态分析,得到压电薄膜声传感器的灵敏度为16.4 mV/Pa;模态分析得出了传感器的第一阶固有频率为12.379 kHz;谐响应分析则获得感应电压与动态外力频率之间的关系。这些分析为此类声传感器的设计提供了理论依据。

The principle and the corresponding structures of the ZnO piezoelectric thin film acoustic sensor are presented. The static, modal and harmonic analyses of the piezoelectric thin film acoustic sensor are carried out by using software ANSYS 9.0. The sensitivity of the piezoelectric thin film acoustic sensor is 16.4 mV/Pa by the static analysis. The first-order inherent frequency of the sensor is 12. 379 kHz by modal analysis. The relationship between inducted voltage and dynamic pressure frequency is deduced by harmonic analysis. All these analyses are helpful to design such acoustic sensor in theory.