三维MEMS加速度计的性能测试方法与分析

Property Measurement and Analysis of Triaxial MEMS Accelerometer

文章针对一种三维MEMS加速度计,提出了三维加速度计的测试方法,并根据测试结果对此加速度计进行了性能分析。通过对其设计原理和内部结构的描述,指出该型MEMS加速度计的结构优点及性能特点。针对该加速度计,作者设计了测试装置,制作了测试电路,并在文章中详细描述了测试原理及整个测试过程。分别在三个方向上,对此三维MEMS加速度计进行了多次对比测试,同时采集包括标准加速度计输出和MEMS加速度计三向输出在内的四路信号,以便进行冲击方向上两加速度计的横向对比和三向MEMS加速度计的轴间耦合分析。测试结果表明,此测试方法和装置是可靠有效的,且具有一定的通用性可用于其它类似传感器的测试分析中。

The article introduces a testing method of triaxial aceelerometer in allusion to one kind of triaxial MEMS accelerometers, and performance analysis is applied according to the MEMS accelerometer test results.The design principle and its internal structure is introduced briefly, and the advantages and performance parameters is given too.A test device and the corresponding test circuits are designed for this accelerometer.Comparing tests of the MEMS accelerometer are applied under many times.The output of standard reference aceelerometer and the three axial outputs of MEMS aecelerometer are recorded synchronously,so that the compare between the two accelerometer outputs in impacting directions and coupling analysis of the triaxial MEMS accelerometer among the three axes can be done.The test result indicates that,this measure method and the testing equipment are reliability, effectivity and versatility, can be used in other similar sensor measuring experiments.