摘要
用直流磁控溅射法分别在Si及陶瓷管上制备掺有CuO的SnO2纳米薄膜,并用马弗炉进行500℃和700℃的退火处理。利用气敏测试系统对各样品进行气敏特性测试,500℃退火的样品对几种被测气体基本都有较高的灵敏度,且随着工作温度的提升,气敏特性下降。700℃退火的样品对乙醇具有很好的选择性,表现较好的灵敏度,当最佳工作电压为6.5 V时,在乙醇气体小注入条件下,对样品的测试体现了样品良好的气敏特性。
Nanosized SnO2 thin films doped with CuO were respectively prepared on Si （ 111 ） and Al2O3 substrates by DC reactive magnetron sputtering. Annealing was carried out, at 500 ℃ and 700 ℃ respectively, Each sample was tested by gas-sensitivity measurement, the sample showed higher sensitivity to the different tested gases after 500℃ annealing. The higher the operating temperature, the worse the sensitive properties were, The sample showed good selectivity and sensitivity towards ethanol vapor after 700 ℃ annealing. When the best operating voltage was 6.5 V, the sample showed good gas sensitivity even for the lower density of ethanol vapor.
出处
《半导体技术》
CAS
CSCD
北大核心
2007年第9期781-784,共4页
Semiconductor Technology
