一种提高子孔径拼接测量精度的误差修正方法

An algorithm of error correcting for improving precision of stitching measure

干涉拼接测量技术主要用于大口径光学器件的测量,由于其能够测量出被测表面的细节,也开始应用于非球面的测量.拼接测量面临的主要问题是拼接测量过程中的误差累积,如何消除拼接误差,尤其对非球面拼接测量的误差修正,是干涉拼接测量的技术关键.本文就拼接误差修正中难以解决的随机误差与高阶波像差问题进行了研究,在研究拼接测量中所引入的误差的基础上,建立了拼接测量的误差修正模型,并提出误差随机修正的方法,实现随机误差和高阶波像差修正.根据所建立的模型和误差修正方法,进行实验验证,实验结果表明,利用误差随机修正技术能够修正随机误差和高阶波像差,其拼接测量结果比传统的修正调整误差方法更接近于全孔径测量结果.

Stitching interferometry technology is used for testing large aperture optical parts, because it can test the detail of the tested surface, and began to be used for testing aspheric surface. The basic question during in stitching testing is accumulation errors. Therefore, how to remove the stitching errors, especially on the aspheric surface testing, the errors correcting is the key technology. Aiming at the random errors and high rank wavefront aberration are difficult to be corrected. On the basis of studying the introducing errors during the stitching testing, we set up the errors correcting function, and present a method of random correcting errors. Basing on the function and the method of random correcting errors, we do the experiment to verify the test method. The result of experiment shows the stitching measure result using the technology of random correcting errors is more precise than traditional correcting adjust errors method＇ s, and is more approximate to the whole parts measure result.