小型非球面光学元件测量技术研究

Research on the Measurement of Small Optical Element with Aspheric Surface

非球面光学元件应用越来越广泛,其测量技术非常关键。本文研究了小型非球面光学元件的各种面形测量方法,针对其测量原理进行了分类和对比,对其优缺点和适用范围进行了讨论,同时分析了各种测量方法实现的关键技术和面临的挑战。

The optical elements with aspheric surface are widely applied now in many fields, where the measurement of aspheric surface plays a critical role. The measuring methods for small aspheric optical elements are introduced in this paper. Then according to the measuring principle the methods are classified and compared. The advantages, disadvantages and application scope of the methods are also discussed. Finally, the critical problems and facing challenges in realization of these methods are analyzed.