摘要
非球面光学元件应用越来越广泛,其测量技术非常关键。本文研究了小型非球面光学元件的各种面形测量方法,针对其测量原理进行了分类和对比,对其优缺点和适用范围进行了讨论,同时分析了各种测量方法实现的关键技术和面临的挑战。
The optical elements with aspheric surface are widely applied now in many fields, where the measurement of aspheric surface plays a critical role. The measuring methods for small aspheric optical elements are introduced in this paper. Then according to the measuring principle the methods are classified and compared. The advantages, disadvantages and application scope of the methods are also discussed. Finally, the critical problems and facing challenges in realization of these methods are analyzed.
出处
《计测技术》
2007年第4期1-4,13,共5页
Metrology & Measurement Technology
基金
国家重大基础研究项目(2003CB716207)
国家自然科学基金资助项目(50405033)
日本三丰科学技术振兴协会资助项目
关键词
非球面
光学元件
接触测量
非接触测量
aspheric surface
optical element
contact measurement
non-contact measurement