基于机器视觉的宏/微双驱动与控制系统的研究

Research of macro/micro dual-drive and control systme based on machine vision

针对目前单一的驱动方式日益不能满足越来越多的微操作的要求;提出了利用步进电机和压电驱动器组成宏/微双驱动的微操作平台。步进电机实现大行程移动和定位,压电驱动器进行高精度定位误差补偿。同时为了解决宏/微双驱动两部分的协调控制问题,提出了利用全局机器视觉的协调控制方法,将末端执行器与目标点的距离作为控制阈值;如果当前距离大于设定的控制阈值,则启动宏动台进行驱动定位;否则启动压电驱动器进行定位误差补偿。试验结果表明:系统的定位速度快,定位精度为1μm,稳定定位时间小于40ms。

Put forward adopting motor and PZT to make macro/micro dual-drive microoperation stage.The motor achieve large range motion and positioning, The systme make use of PZT achieving high precision error compensation.A t the same time,in order to assort with macrostage and microstage,the paper also put forward adopting machine vision control method, the distance between the end implement tool and the aim place is looked as control threshold; If the distance large more than the threshold, then startup marostage to drive and positioning, otherwise, startup PZT to drive and positioning error compensation. Test show：the systme can achieve fast positioning, positioning precision 1μm, stabilization time less than 40ms.