摘要
根据MEMS光栅的工作特点及结构参数,提取光栅的等效电容,并采用高压运算放大器PA69研制出一种新型的MEMS光栅的动态驱动电路。为了避免自激振荡的发生,电路中采用了频率补偿和并联反馈电容的方法,有效提高了电路的稳定性。经过测试,其动态性能与PSPICE10仿真的结果非常吻合。该动态驱动电路完全能够满足MEMS光栅动态复杂控制的需要。
This paper has extracted the equivalent capacitance of the MEMS programmable grating based on its work characteristics and structure parameters,and developed an innovative dynamic driving circuit for MEMS programmable grating by using high-voltage amplifier PA69.There are two methods to avoid self oscillation： frequency compensation and feedback capacitance,which effectively improved the stability of the circuit.The dynamic performance of the circuit has been tested in practice,which matches the PSPICE10 simulation results very well.This driving circuit is appropriate for controlling MEMS programmable grating in complicate and dynamic conditions.
出处
《国外电子元器件》
2007年第9期33-36,共4页
International Electronic Elements
关键词
MEMS光栅
高压运算放大器
PA69
自激
MEMS programmable grating
high-voltage amplifier
PA69
self oscillation
