等离子体在电容放电中的高低频振荡与不稳定因素

Instability parameters of high and low frequency oscillations in plasma central discharge and periphery region

已经在连接外围接地舱的主电容放电舱里观察到了氩气驰豫振荡。等离子体振荡是通过从主放电舱显示出来的随时间变化的光发射现象观测到,高频(75.37kHz)驰豫振荡在100mT和8w的吸收功率,低频(2.72Hz)驰豫振荡在100mT和325W的吸收功率。随时间变化的光发射强度以及等离子体密度也通过Langmuir探针探测到。理论结果与实验有较好的吻合。

We have observed relaxation oscillations in a capacitive discharge connected to a peripheral ground chamber,in Argon gas.The plasma oscillations,observed from time-varying optical emission from the main discharge chamber,show,for example,a high frequency（75.47kHz） relaxation oscillation,at 100mTorr and 8W absorbed power,and a low frequency（2.72Hz） relaxation oscillation,100mTorr and 325W absorbed power.Time-varying optical emission intensity and plasma density were also detected with a Langmuir probe.The theory agreed well with experiments.