ITO玻璃衬底上生长的Zn_(0.9)Mg_(0.1)S多晶薄膜特性研究

Characteristic Study of Zn_(0.9)Mg_(0.1)S Polycrystalline Thin Films Grown on ITO Glass

以ZnS和Mg粉末为原料,采用真空蒸镀技术在ITO玻璃上成功地制备了宽禁带三元化合物Zn0.9Mg0.1S多晶薄膜。原子力显微镜和X射线衍射研究表明:薄膜生长形貌和结晶性能良好,为择优取向的立方闪锌矿结构,晶粒直径约20nm,薄膜的X射线衍射峰较之ZnS的衍射峰向大角度方向移动了0.46°;室温下的拉曼谱峰相对于ZnS的拉曼谱峰出现蓝移,且347.67 cm-1谱峰比较强;光致发光谱显示,Zn0.9Mg0.1S薄膜在410nm处有一个较强的发光峰。良好的结晶质量和发光特性为开发多功能材料和器件提供了可能性。

Zn0.9Mg 0.1S polycrystalline thin films on ITO glass substrates were successfully prepared by vacuum evaporation using ZnS and Mg powder.The morphologies,structures and optical characteristics of the thin films were investigated by AFM,XRD,Raman spectra and PL spectra.The results indicate that the high quality films have preferred orientation and zinc blende structure.The grain size is about 20 nm.Comparing the XRD spectra peaks of ZnS,those of the films move to the big angle direction due to Mg entering the ZnS crystal lattice.The blue shifts occur in the Raman spectra of the films in comparison with ZnS Raman spectra.347.67cm^-1 peak is stronger.The photoluminescence（PL） spectrum of Zn0.9Mg 0.1S thin films shows a blue light emission peak at wavelength 410nm with a narrower full-width of maximum height（FWMH）. The excellent properties of the Zn0.9Mg 0.1S polycrystalline thin films make them attractive materials for photoelectronic device applications.