摘要
报道了用ＦｅＣｌ＋、５６Ｆｅ＋和３５Ｃｌ＋轰击Ａｇ靶的溅射原子角分布和产额测量结果．发现ＦｅＣｌ＋轰击Ａｇ的原子溅射产额与５６Ｆｅ＋和３５Ｃｌ＋轰击的溅射产额之和相比有大的增强．
Measurements of the angular distributions and yields of atoms sputtered from Ag target by bombardment with FeCl +, 56 Fe + and 35 Cl + are reported. Large enhancement occurs in the measured Ag atom yield for FeCl + projectile in comparison with the sum of the sputtering yields for 56 Fe + and 35 Cl + bombardment at same impact velocities .The enhanecment can be explained by a model of the thermal spike evaporation plus surface topography effect.
出处
《高能物理与核物理》
CSCD
北大核心
1997年第4期304-310,共7页
High Energy Physics and Nuclear Physics
关键词
离子溅射
级联碰撞
金靶
溅射产额
非线性增强
ion sputtering ,angular distribution of sputtering atoms,sputtering yield,non linear enhancement,thermal spike effect,surface topography effect.
