平凸型氮化硅球面微透镜的研究

Study of Plano Convex Silicon Nitride Microlenses with Spherical Surface

介绍了用激光化学汽相沉积（ＬＣＶＤ）球面微透镜的技术。首先对激光化学汽相沉积法获得球面微透镜进行了理论分析，并用计算机分析了在一定沉积条件下的微透镜厚度剖面形状及光学聚焦特性。其后介绍了激光化学汽相沉积的实验装置，用该装置在平面石英玻璃衬底上，制出了平凸型氮化硅球面微透镜，并对其参量进行了测量。实验中还摸索了激光化学汽相沉积的沉积工艺。实验结果表明，通过控制源气体的化学配比与浓度，调节激光功率与衬底上的光斑尺寸，选择沉积时间，可以获得不同直径、透明。

In this paper, a technique of fabricating spherical surface microlenses by laser chemical vapor deposition (LCVD) was introduced. The theoretical analysis and the experimental system of spherical microlenses deposited by LCVD are giren. Under certain conditions of deposition the thickness profile and the optical focusing characteristic of microlenses were simulated with computer. Plano convex silicon nitride microlenses with spherical surface on flat quartz substrate was successfully fabricated and their parameters were measured. The experimental results indicated that through controlling the chemical mixture ratio and concentration of source gases properly adjusting the laser power and spot size on substrate, and selecting appropriatelly the deposition time the transparent plano convex silicon nitrid microlenses with smooth spherical surface and different diameters could be obtained.