碳化硅表面改性和光学镜面加工的研究现状

Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide

为了获得满足光学应用要求的碳化硅光学镜面,通常采取碳化硅表面改性和改进光学镜面加工的方法.碳化硅表面改性的主要方式是在碳化硅表面镀致密化涂层.本文介绍了在碳化硅表面化学气相沉积碳化硅和物理气相沉积硅两种碳化硅表面改性技术,并对碳化硅光学镜面加工的研究现状进行了综述.

Surface coating and exploring new fabrication methods are two kinds of ordinary processes to achieve the fine optical surface of silicon carbide. Two main coating techniques of silicon carbidebased materials, CVD SiC and PVD Si on SiC surface are introduced, and the recent developments of silicon carbide optical fabrication methods are reviewed in detail.