新型磁光石榴石薄膜的液相外延生长

The Growth of a New Type Magneto Optic Garnet Film by LPE

对高掺铋（ＹｂＴｂＢｉ）３Ｆｅ５Ｏ１２及（ＥｒＧｄＢｉ）３Ｆｅ５Ｏ１２磁光单晶薄膜的液相外延生长进行了实验研究．用液相外延法将薄膜生长在大晶格常数的ＣａＭｇＺｒ：ＧＧＧ基片上，实验中采用新的材料配方与工艺技术，特别是在薄膜晶体生长中采用变化熔料温度与基片转速的新技术，生长出多分层而不开裂的薄膜，使用Ｄ／ＭＡＸ－ⅢＢ型晶体衍射仪测量了样品的Ｘ射线衍射谱。

The LPE growth of magneto optic single crystal film (YbTbBi) 3Fe 5O 12 and (ErGdBi) 3Fe 5O 12 has been experimentally investigated. The film is grown on substrates of CaMgZr:GGG of large lattice constant. New material formulation and technological process ware adopted. In particular, variable melting temperature and variable substrate rotating speed during crystal growth were employed so that the multilayer crack free films were grown. The X ray diffraction spectra of samples were measured with a D/MAX ⅢB crystal diffractometer. Experimental results are discussed with emphasis placed on the preparation of high quality film with large thickness.