面向瓶颈的半导体晶圆制造系统派工策略及参数优化

The Bottleneck-Oriented Dispatching Strategy and Parameter Optimization in Semiconductor Wafer Fabrication System

针对半导体晶圆制造系统中瓶颈设备动态漂移的特性,提出一种动态瓶颈实时派工策略.它是根据瓶颈机台的实时信息做出决策,决策参数通过响应曲面法和期望函数法确定并优化.实例验证表明,该算法相对于其他两种派工策略,在产能、加工周期、方差和制品数量等4个指标上均有所改善.

According to the characteristics of dynamic bottleneck in semiconductor wafer fabrication system （SWFS）, a dynamic bottleneck real-time dispatching （DBRD） strategy was proposed. The DBRD makes decision according to the real-time information, and the decision parameters are determined and optimized by using response surface method and desirability function approach. The simulation results prove that the proposed DBRD strategy is superior to other two strategies on the mean and variance of cycle time, work in process and throughput.