非制冷红外微测辐射热计有限元模型的构建

Design of Uncooled Infrared Microbolometer Finite Elements Models

根据微加工条件能够制造的单层和双层结构的非制冷红外微测辐射热计的尺寸,进行了有限元建模与分析,寻找出在可接受的性能与成本之间折衷的设计方案,指出气体热导是影响探测单元热导的一个主要因素,并对其进行了理论分析,给出减小气体热导的方法及这些方法在双层及单层结构中应用的可行性。

According to the micro-process condition for fabricating uncooled infrared microbolometer with monolayer and double deck configurations, a finite element model was built and analyzed, a compromise design was proposed considering the acceptable performance and costs. It pointed out that gas thermal conductivity was the main factor influencing the thermal conductivity of sensor cell, and theoretical analyse was done. The ways to reduce the gas thermal conductivity were given, and the feasibility for use in the monolayer and double deck configurations was indicated.