摘要
采用基于MEMS技术的ADXL330三轴加速度计芯片,设计了适合水下结构振动测试的加速度传感器,并应用于某输水管线闸门振动监测系统中。分析了ADXL330结构、原理和标定方法。根据水下结构振动测试特点和要求,设计了应用电路、防水结构以及振动测试系统。现场应用表明,采用该芯片设计的三轴加速度传感器能够满足水下结构振动监测的需要,具有低成本、高精度、易安装和安全可靠等特点。
Using three-axis accelerometer ADXL330, a single monolithic IC, based on micro electromechanical systems (MEMS), an accelerator transducer for underwater structure was designed and applied to a vibration measurement system of long pipeline gates. The principle and structure of ADXL330 were analyzed, and the calibration method was studied. According to the properties and demands of vibration measurement for underwater structure, the application circuit, the water-repellent structure and the vibration measurement system were researched. It is proved by the field measurement that the ADXL330-based three-axis accelerator transducer is suitable for vibration measurement of underwater structure and has low cost, good precision, easy installation, and high reliability.
出处
《微纳电子技术》
CAS
2007年第7期159-161,共3页
Micronanoelectronic Technology