石英单基多谐振器力敏特性与加力方位的关系

Relation of Force Sensitive Characteristic and Adding Force Azimuth of the Quartz Crystal Single-Base Multi-Resonator

根据石英晶体振动理论及力敏特性,在同一圆形晶体基片上设计制作了多个石英晶体谐振器。采用对径加力的方式,研究了这种石英单基多谐振器的力敏特性与加力方位的关系,并与传统的单基单电极谐振器的力敏特性进行了比较。实验结果表明,同一晶体基片上不同位置的谐振器的力敏特性与加力方位密切相关;选择适当的加力方位,可使多电极结构的谐振器的力-频转换系数优于单电极谐振器的力-频转换系数。

According to quartz crystal vibrated theory and force sensitive characteristic, some quartz crystal resonators were manufactured on the disc crystal. The force applied along the diameter of quartz plate, the relation of resonators＂ force sensitive characteristic and adding force azimuth were studied and compared with the traditional single-base single-electrode resonator force sensitive characteristic. The result approves that the force sensitive characteristics of the resona- tors at the same crystal substrate different positions are correlated with adding force azimuth strongly,force-frequency conversion coefficient of the multi-electrode structure resonator is better than that of the single-electrode resonator by selecting a suitable adding force position.