摘要
研究了一种适用于液相化学和生物量检测的单片扫描式QCM阵列传感器,研究了器件的封装及其在液相条件下的工作稳定性。采用单边封闭的封装方式,研究了器件在单边触液条件下的工作特性。阵列器件采用扫描工作方式,分时激励阵列中的各单元器件依次进入谐振工作状态,使某一时刻仅有一个单元器件处在工作状态,避免了单元器件间的振动耦合。实验制作的单片扫描式QCM阵列传感器试验结果显示,阵列器件中各单元器件的气相平均频率稳定度达到±0.2×10-6/h,液相平均频率稳定度达到±0.4×10-6/h。
Abstract： A novel monolithic scanning QCM （quartz crystal microbalance） sensor array Ior uetec- ting in liquid was investigated. The design aspects of the sensor array, the scanning measuring circuit, the resonant circuit, the packaging of the sensor array as well as the performance of the sample device immersed in liquid were investigated. The results show that the distance between electrodes has no remarkable influence to the resonators with the operation mode of scanning in turn. According to this conclusion, the configuration of the electrodes can be further optimized, thus more resonators could be integrated on the same plate. It is also shown that the frequency stability of the QCM sensor arrays could be up to about ± 0. 2 × 10^-6/h in gas, and ±0. 4 × 10^-6/ h in liquid.
出处
《微纳电子技术》
CAS
2007年第7期400-403,共4页
Micronanoelectronic Technology
