摘要
描述了一种采用MEMS技术加工的微型气相色谱柱,这种色谱柱采用深刻蚀技术加工出色谱通道,再与Pyrex7740玻璃进行键合密封。色谱柱全长6m,色谱通道截面为矩形(宽100μm,深100μm),针对苯和甲苯的混合气进行了分离试验,理论塔板数达到了4800,分离时间为185s。
A microfabricated gas chromatography column based on MEMS technologies was presented. The column was fabricated using a deep reactive ion etch (DRIE) and was sealed with a Pyrex 7740 glass cap. The rectangular-shaped column, which is 6 m long(100μm width and 100 μm height), has separated 2 gaseous components (benzene and toluene) in 185 s, and achieves approximately 4800 plates.
出处
《微纳电子技术》
CAS
2007年第7期407-409,416,共4页
Micronanoelectronic Technology