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旋转载体用硅微机械陀螺的相位研究 被引量:1

Phase Research of Silicon Micromachined Gyroscope Used for Rotating Carrier
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摘要 介绍了利用旋转载体自身旋转作为驱动力的硅微机械陀螺的相位提取技术。当陀螺的敏感轴平行于载体偏转平面时,硅摆所受的哥氏力最大,输出为正弦信号的峰值;当它的敏感轴和偏转平面垂直时,输出为正弦信号的零值。因此,以载体的自转信号为基准,通过比较输出信号波峰在输入基准坐标中相位的变化可知敏感轴的方向,进而能够确定旋转平面及载体在空间中的偏转方向。 The phase picking up technique of silicon micromachined gyroscope used for rotating carrier was proposed. When the sensitivity axes parallel to the deflexion plan, silicon pendulum will get the biggest Coriolis force, and the outputs are the peak value of the sine wave, when the sensitivity axes perpenticularity to the deflexion plan, the outputs are the zero value of the sine wave. Taking the input signal of the gyroscope as the benchmark, the orientation of the sensitivi- ty axis by comparing the output signal phase in benchmark coordinate will be observed, and the circumrotating plan and the deflexion orientation of rotating carrier in the space can be confirmed.
出处 《微纳电子技术》 CAS 2007年第7期427-429,437,共4页 Micronanoelectronic Technology
基金 国家自然科学基金资助项目(60472011) 北京市传感器重点实验室资助项目(53062017)
关键词 旋转载体 硅微机械 陀螺仪 相位 rotating carrier silicon micromachined gyroscope phase
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