摘要
介绍了一种单片集成电容式压力传感器接口电路，该电路基于电容一频率转化原理，并通过差频消除了温度变化和工艺波动对电路性能的影响。使用Pspice对接口电路的误差特性进行了分析，并依据仿真结果确定了电路的相关参数。最后给出电路的测试结果，测试结果与仿真结果一致，在80～110kPa量程内，接口电路的分辨率为3．77Hz／hPa。
An interface circuit based on the principle of capacitance-frequency conversion of the capacitive pressure sensor was introduced. The influences of the fluctuation of temperature and process were eliminated in virtue of differential-frequency circuit. The error characteristic of the interface circuit was analyzed by Pspice, in terms of which the parameters of the circuit are confirmed. The measure of the circuit was presented. The measure results accord with Pspice simulation, the revolution of the circuit is about 3.77 Hz/hPa in 80-110 kPa.
出处
《微纳电子技术》
CAS
2007年第7期502-504,共3页
Micronanoelectronic Technology
基金
国家自然科学基金重点课题资助项目(90607002)
