静电拉伸薄膜反射镜成形机理研究

Research on Shaping Stretched Membrane with Electrostatic Curvature Mirrors

静电拉伸薄膜反射镜是利用静电场库仑力作用使薄膜产生面形变化,生成所需的光学曲面。由于薄膜反射镜成形过程中力场与静电场的相互耦合作用非常复杂,使其到目前为止在面形控制的理论分析上仍未有定量的结果。首先以平板电容理论为基础,对薄膜成形静电力场进行了近似分析,然后根据半球模型求解了薄膜结构变形,最终得到了薄膜反射镜面形尺寸与静电压参数的函数关系。所得结论对静电拉伸薄膜的研究工作具有一定的指导意义。

The stretched membrane with electrostatic curvature （SMEC） mirror is a newstyle optical technology progressed currently. Its fundament is to use attractive force of electrostatic field to deform membrane film whose figuration is according to imaging requirements. Presently, the method of controlling the shape of SMEC mirror has not been leavened as a quantitative conclusion from theoretical analysis because of the difficulties of solving relation of attractive force of electrostatic field and deformation of membrane film. The functional relation of electrostatic voltage and other parameters which would influence the shape of SMEC mirror is given and this method is approximately deduced from the two supposes of parallel plate capacity and hemisphere mode of the deformation of membrane film could be available for the research of the SMEC mirror.