摘要
本文介绍软X射线多层膜反射率计的工作原理,并着重介绍采用MCS—51系列单片机来完成数据采集、处理、控制和显示等功能的硬件结构特点和软件编程方法。最后给出实际测量数据与分析。
In this paper the operation principle of the soft X-ray multilayer film reflectance-meter was introduced with the emphasis on the feature of the hardware structure and software programming for the data acquisition, processing, control and display using MCS-51 series of single-chip microcomputers. Finally the measured data and analysis are given.
出处
《光学机械》
CSCD
1990年第3期56-61,共6页