光栅干涉仪的运动误差原理

Moving Error Principle for Grating Interferometers

本文应用衍射光栅干涉仪的半波相位差面原理模型,说明光栅摆动误差引起的干涉条纹变化情况,进而分析得出光栅干涉仪运动误差公式。可作为设计和应用此种干涉仪的依据之一。

The moving error in the grating interferometer can change interference fringes according to the principle of half-wave phase difference plane. In this paper the moving error formula for grating interferometer is derived. It may provide a basis for designing and using the grating interferometer.