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制造全息光栅的新装置 被引量:3

A new device for manufacturing holographic gratings
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摘要 本文报道一种利用洛埃镜原理制造全息光栅的新装置及其调整方法.该装置具有光学系统简单,干涉条纹定位精度高和调整方便等优点,可制造性能良好的全息光栅. A new device and its setting method for manufacturing holographic gratings have been demonstrated based on the principle of Lloyd mirror. The advantages of the device are of simple in optical system, high in locating accuracy of interference fringe and convenient to setting, etc. It can be used in manufacturing holographic gratings suitable for spect oscopy.
作者 祝绍箕
机构地区 上海光学仪器厂
出处 《光学学报》 EI CAS CSCD 北大核心 1990年第2期189-192,共4页 Acta Optica Sinica
关键词 光栅 全息 洛埃镜 holographic gratings Lloyd mirror.
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  • 1祝绍箕,衍射光栅,1986年

同被引文献28

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  • 9巴音贺希格, 齐向东, 李英海 等. 一种平面全息光栅制作中精确控制刻线密度的方法[P]. 专利号:ZL 2003 1 0115844.2.
  • 10J. Ferrera. Nanometer-Scale Placement in Electron-Beam Lithography[D]. PhD dissertation, Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, June 2000.

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