利用光声光谱研究掺硫非晶硅薄膜的吸收特性

Photoacoustic spectral study on absorption properties of s-doped α-Si: H films

本文考虑到薄膜样品表面的多次反射,从理论上推导了光声信号的表达式.对α-Si:H薄膜和掺硫α-Si:H薄膜随入射光波长变化的吸收系数曲线进行了测定,并获得了光学带隙与掺硫浓度的关系.

We have theoretically derived the photoacoustio signal of thin films taking the multiple reneotion effect into account. Photoaooustio absorption spectra of α-Si:H and s-doped a-Si:H films were measured. The relation between the optical band gap and density of the doping sulphar was obtained.