脉冲激光微细加工曝光区温度的不接触测量

Remote Temperature Measurement of the Exposed Region in Pulse Laser Assisted Microprocessing

针对大功率脉冲激光微细加工区域工作激光对辐射测温的影响,提出在周期脉冲激光的间隙内提取温度信号的新方法,应用采样保持原理,研制相应的测量系统,通过温度定标,从A/D采样值直接读取温度值。结果表明,该温度测量系统能有效地消除工作激光对温度测量的干扰,准确地测量曝光区域的温度,在温度为500℃左右时,系统的温度分辨能力可达0.03℃,能满足激光扩散、激光合金等工艺要求。

In order to eliminate the serious influence of the working laser on the accuracy of the temperature measurement,a new method has been proposed, and the corresponding measuring system has been designed and fabricated. Based on the sampling and holding principle,the temperature information is picked up in the intervals between the laser pulses. Temperature calibration has been put into practice to get real temperaures from AD values directly. Experimental results show that the system can eliminate the serious influence of the working lair effectively,and measure the temperature of the small exposed region accurately in the pulse laser assisted microprocessing. A temperature resolution of 0.03 ℃ has been obtained when the temperature is around 500 ℃,which satisfies the requirements of the induced diffusion and alloying.