多层结构氧化锌薄膜制备

Preparation of Multilayer Structure ZnO Films

介绍了高频声体波微波延迟线用多层结构氧化锌薄膜的制作方法，并对这种交替排列不同结晶取向的多层氧化锌薄膜的微观结构、成膜机理进行了分析和阐述。用具有不同机电耦合系数、厚度为半波长的交替排列多层氧化锌薄膜制成了中心频率为８ＧＨｚ的声体波微波延迟线。

The preparing methods of multilayer structure ZnO films for microwave bulk acoustic wave delay lines are described.The microscopic structures and the growth mechanisms for the multilayer ZnO films with alternating orientation crystal structure are examined and outlined respectively.The microwave bulk acoustic delay lines with centre frequency of 8 GHz were fabricated using a multilayer structure consisting of alternative half wave thick layer of ZnO films with different electro mechanical coupling factors.The growth conditions and the responding experimental results for the new structure piezoelectric ZnO materials are also presented.