摘要
双金属效应是一种基本的物理效应，这一效应在硅微机械装置上的应用，有力地弥补了硅材料不具备压电效应，电信号难以直接转换为机械驱动力的缺陷。本文将介绍我们研制的铝硅双金属膜片．膜片尺寸为4mm×4mm×（20μm单晶硅＋10μm金属铝）．实验和分析结果表明，铝硅双金属膜片具有优越的力学特性，能提供足够大的动力和位移。这种集成的单片驱动结构不仅在材料及工艺上与IC工艺完全兼容，而且通过调整有关结构参数及工艺参数，可使该结构在5伏电压下稳定工作，为实现硅微机械系统（MEMS）奠定了基础．这种驱动方式是目前制造微阀门、微流量泵等需要大动力、大位移的硅微机械及其系统的理想驱动结构．
An integrated driving structure based on bimetal effect has been designed and fabricated by using advanced micromachining techniques. The processing and materials used are fully compatible to standard IC fabrication technology. The silicon aluminum bimetal membrane has an area of 4×4mm2 with 20μm thick silicon and 10μm thick aluminum film. By elaborate design and fabrication, the bimetal membrane can operate at 5V voltage level, providing sufficient strong driving force and distinct displacement. Silicon aluminum bimetal membrane is thought to be one of the best driving structure for fabricating silicon microactuators such as microvalve, micropump and corresponding systems.
基金
国家攀登计划B支持
