横向加速度传感器设计及特性研究

Design and Characterization of Silicon Lateral Accelerometer

一般微机械加工的梁──岛结构加速度传感器，梁的平面都是与器件平面平行的，因此只能测量器件平面法向的加速度分量．我们提出了一种制作梁平面与器件平面相垂直的梁──岛结构的微机械加工方法，并用以设计和制造了一种可测量平行于器件平面的加速度分量的横向加速度传感器，为研制三维加速度传感器提供了新思路．

The beam for a conventional beam-mass accelerometer is coplanar with the wafer plane. Therefore, the conventional accelerometer is sensitive to an acceleration component normal to the device plane. A novel accelerometer with a beam plane vertical to the wafer plane has been fabricated and characterized. This accelerometer is sensitive to an acceleration component in the wafer plane and vertical to the beam. Therefore, it is called a lateral accelerometer and two conventional accelerometers will lead to a miniaturized three dimensional accelerometer.