红外高效增透膜镀类金刚石膜的特性研究

Characteristics investigation of diamond-like carbon film deposited on IR high efficiency anti-reflection coating

外层为氟化物的红外高效膜、膜层软、易吸潮和氧化.本文提出使用类金刚石膜做红外高效膜的保护膜,讨论了镀制类金刚石膜后,镀膜件光谱特性的变化情况.

The IR high efficiency All-coating with fluoride outlayer is soft, easily moistened and oxidated. This paper proposes a method of using Diamond-Like Carbon (DLC) filn as a protecting coating for high efficiency AR-coating and discusses the change of characteristics of AR-coating after being coated with a DLC film.