双离子束溅射淀积DLC膜的红外特性

IR transmittance behaviour of DLC films prepared by dual-iun beam sputtering method

用双离子束溅射法在50℃以下的玻璃基片上淀积了类金刚石碳(DLC)膜.研究了轰击离子能量、轰击离子束流密度及轰击源内氢/氩流量比例对淀积片红外透射特性的影响.所用波段是1.5～5.5μm.结果表明,对所有淀积样片,其相对透过率均随波长增长而增大.在每组实验中,随如上各可变参量的增大,各样片的相对透过率～波长曲线均有先上升后下降的规律.确定了各组相应的临界参数.结果还表明,轰击源不含氢并不影响DLC膜的制取,但轰击源合氢时所制得的膜具有更好的红外透射性.从结构变化的角度解释了上述规律.

Diamond-like Carbon films were deposited onto the glass substrate at 50℃ by dual-ion beam sputtering method. The function of the sputtering apparatus was briefly introduced. The influences of the bombarding ion energy, the bombarding ion beam current density and the ratio of hydrogen to argon gas in bombarding ion source on the infra-red (IR) transmittanoe behaviour of deposited specimens were investigated in 1.5-5.6μm wavelength range. It showed that for all specimens, their relative transmittanoe increase with the increase of wavelengths. For each group of experiment in which only one parameter as described above varied, with the increase of varying parameter, the relative transmittanoe v.s. wavelength curves all have a trend to increase first and then to drop. The corresponding critical varying parameters in the four group of experiments were determined Comparison between the non-hydrogenated and the hydrogenated specimens showed that hydrogen in the bombarding ion source was not strictly for the deposition of DLC films, but adding a certain amount of hydrogen oould reduce the sputtering of growing films and oould improve the IR transmittance behaviour of the films. The observed results were discussed and explained in terms of structure changes.