摘要
长光栅位移传感器是一种高精度测量装置,其关键件为长光栅尺。本文对光栅接长技术加以研讨,着重讨论接长光栅对测量精度、位相等的影响,对大量程的长度测量具有实用价值。这一研究已获得成果。
The grating transducer of linear displacement is a high precision metrological measuring device. Its key element is the grating.This paper explorates a tech- nology of grating connection.The effects of connecting grating on measuring accuracy and phase shift are emphatically discussed.It has practical value for large scale metrological neasuring.This research work has yielded good result.
出处
《光学仪器》
1990年第6期1-6,共6页
Optical Instruments
