Sol-Gel法制备择优取向铁电陶瓷薄膜的研究进展

The development of study on preferred oriented ferroelectric ceramics films fabricated by the Sol-Gel method

综述了溶胶—凝胶法制备择优取向铁电陶瓷薄膜的研究现状,主要介绍了制备过程中衬底材料、热处理工艺、前驱体以及掺杂等因素对铁电陶瓷薄膜择优取向的影响以及铁电陶瓷薄膜的择优取向与铁电性能的关系。

This paper summarizes the research progress on preferred orientation ferroelectric ceramics films fabricated by Sol-Gel method, particularly the effects of substrate materials, heat treatment techniques, precursor, doping, etc. The relationship between preferred orientation and ferroelectric properties of ceramics films is also introduced.