非平衡闭合场磁控溅射CrTiAlN/MoST复合涂层的性能研究

Study on properties of closed field unbalanced magnetron sputtered CrTiAIN/MoST coating

采用非平衡闭合场磁控溅射方法在Cr12MoV冷作模具钢表面制备CrTiAlN单一涂层和CrTiAlN/MoST复合涂层,通过AFM、XRD、显微硬度、划痕和磨损试验综合分析涂层相结构和的表面性能。实验结果表明,CrTiAlN/MoST复合涂层比CrTiAlN单一涂层更光滑、致密,(Cr,Ti,Al)N在(111)晶面呈强烈的衍射峰,无明显的MoS_2衍射峰.Cr12MoV经PVD处理后,表面显微硬度和耐磨性得到了明显的提高,尤其是复合涂层,由于CrTiAlN硬涂层抗磨和MoST软涂层减摩的综合作用表现出比CrTiAlN涂层更低的磨损率,主要的磨损机制为逐层剥落的疲劳磨损。

CrTiAlN and CrTiAlN/MoST coatings were prepared on Crl2MoV steel using a closed field unbalanced magnetron sputtering technique. The coated surface properties were characterized by AFM, XRD, microhardness, scratch and wear tests. The experimental results show the CrTiAlN/MoST coating was found to be smoother and with density higher than the CrTiAlN coating, while its crystal structure was similar to CrTiAlN combined with amorphous phase or submicro-crystals of MOST. The surface microhardness and wear resistance of Crl2MoV steel were significantly improved by the PVD coatings. The CrTiAlN/MoST coating exhibited a lower wear rate compared to the CrTiAlN, due to a hard, tough CrTiAlN coating and self-lubricated MoST coating. The wear mechanism acted was mainly fatigue wear by gradual layer pitting,