摘要
采用多面体和光电平行光管测试圆刻机分度误差,比较了12、36、72面体的测试特点。
The dividing error of the circular dividing machine were measured with a polygon mirror and a photo electric auto collimator. The characteristics of measuring with 12,36 and 72 sided polygon mirror are compared. From the measuring data analysis, Some error factors can be fonnd.
出处
《光学技术》
CAS
CSCD
1997年第1期31-34,共4页
Optical Technique
关键词
多面本
分度误差
测试
polygon mirror, dividing error, measring.