摘要
分析了影响复制光栅衍射效率、分辨率及表面质量的因素，并介绍了提高复制光栅质量的方法。
Factors having effects on diffraction efficiency,resolution and surface quality of reproduction grating are analyzed in this paper.The methods are described to improve quality of the reproduction grating.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第4期70-75,共6页
Optics and Precision Engineering
关键词
复制光栅
衍射效率
表面质量
光栅复制工艺
Reproduction grating,Diffraction effeciency,Grating resolution,Grating surface quality
