摘要
将ZrO2·8%Y2O3用射频磁控溅射技术流积在NiCrAlY基底上,进行1100℃室温,1100℃冷水和900℃室温等热循环和熔盐作用的试验。随后进行X射线衍射(XRD)分析和扫描电镜(SEM)观察。结果表明,沉积态的氧化锆层主要为立方相和少量单斜相及四方相。热循环及熔盐Na2SO4-5%NaCl与ZrO2·8%Y2O3的化学作用都促使立方相向单斜相的转变。
ZrO2·8% Y2O3 is deposited by RF magnetron sputtering on NiCrAlY bond coat,thermal cycling and fused-salt effect experiments were made under the conditions of 1 100 ℃ -room temperature,1 100℃ -cold water,and 900℃~room temperature and were investigated by XRD and SEM. The results show that ZrO2·8% Y2O3 as deposited mainly appears cubic and a little monoclinic phase and tetragonal phase. The thermal cycle and Na2SO4-5% NaCl fused salt promoted the cubic→monoclinic transforma-tion.
出处
《真空科学与技术》
CSCD
北大核心
1997年第2期101-105,共5页
Vacuum Science and Technology
关键词
射频磁控溅射
沉积
稳定性
氧化锆
涂层
Radio frequency magnetron sputtering, Deposition, Stability