射频磁控溅射沉积ZrO_2·8%Y_2O_3的相稳定性研究

A Study on the Stability of ZrO_2·8％ Y_2O_3 by RF-MSD

将ZrO2·8％Y2O3用射频磁控溅射技术流积在NiCrAlY基底上，进行1100℃室温，1100℃冷水和900℃室温等热循环和熔盐作用的试验。随后进行X射线衍射（XRD）分析和扫描电镜（SEM）观察。结果表明，沉积态的氧化锆层主要为立方相和少量单斜相及四方相。热循环及熔盐Na2SO4－5％NaCl与ZrO2·8％Y2O3的化学作用都促使立方相向单斜相的转变。

ZrO2·8% Y2O3 is deposited by RF magnetron sputtering on NiCrAlY bond coat,thermal cycling and fused-salt effect experiments were made under the conditions of 1 100 ℃ -room temperature,1 100℃ -cold water,and 900℃~room temperature and were investigated by XRD and SEM. The results show that ZrO2·8% Y2O3 as deposited mainly appears cubic and a little monoclinic phase and tetragonal phase. The thermal cycle and Na2SO4-5% NaCl fused salt promoted the cubic→monoclinic transforma-tion.