摘要
概述场致发射平板显示器件（FED）的理论基础、结构和工作原理、种类和制作工艺。对FED作出评价。介绍国际上在FED方面的竞争。展望了FED的前景。
The fundamental physlcs of field emission structure and operation principle,types and manufacturing technology of FED are summerized and reviewed. International competition in FED is presented and prospect of it is discussed.
出处
《真空科学与技术》
EI
CSCD
北大核心
1997年第2期119-128,共10页
Vacuum Science and Technology
关键词
真空微电子学
场致发射
FED
平板显示器件
Vacuum microelectronics, Field emission display, Microtip, Field emission arry, Matrix addressing
