Out-of-Plane Magnetic Anisotropy and Microwave Permeability of Magnetoelastic FeCoSiB Amorphous Thin Films
Out-of-Plane Magnetic Anisotropy and Microwave Permeability of Magnetoelastic FeCoSiB Amorphous Thin Films
摘要
Theamorphous magnetoelastic Fe66Co17Si1B6 thin films have been deposited by dc magnetron sputtering. A lot of ＂nano-trenches＂ have been observed on the fdm surfaces by AFM. The permeability of amorphous Fe66COlTSilB6 thin films was measured within the frequency range of 0.6GHz-10.2 GHz. The ferromagnetic resonance frequency was found to be 1.2 GHz. MFM shows that the domain of thin film is a maze-type pattern, which indicates that an out-of-plane magnetic anisotropy exists. The out-of-plane anisotropy is believed due to the stress-induced magnetic anisotropy. It can be inferred that the internal stress is tensile stress and normal to the film plane. Index Terms
Theamorphous magnetoelastic Fe66Co17Si1B6 thin films have been deposited by dc magnetron sputtering. A lot of ＂nano-trenches＂ have been observed on the fdm surfaces by AFM. The permeability of amorphous Fe66COlTSilB6 thin films was measured within the frequency range of 0.6GHz-10.2 GHz. The ferromagnetic resonance frequency was found to be 1.2 GHz. MFM shows that the domain of thin film is a maze-type pattern, which indicates that an out-of-plane magnetic anisotropy exists. The out-of-plane anisotropy is believed due to the stress-induced magnetic anisotropy. It can be inferred that the internal stress is tensile stress and normal to the film plane. Index Terms
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