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Total Sensitivity Index Calculation of Tool Requirement Model via Error Propagation Equation 被引量:1

Total Sensitivity Index Calculation of Tool Requirement Model via Error Propagation Equation
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摘要 A new and convenient method is presented to calculate the total sensitivity indices defined by variance-based sensitivity analysis. By decomposing the output variance using error propagation equations, this method can transform the "double-loop" sampling procedure into "single-loop" one and obviously reduce the computation cost of analysis. In contrast with Sobors and Fourier amplitude sensitivity test (FAST) method, which is limited in non-correlated variables, the new approach is suitable for correlated input variables. An application in semiconductor assembling and test manufacturing (ATM) factory indicates that this approach has a good performance in additive model and simple non-additive model. A new and convenient method is presented to calculate the total sensitivity indices defined by variance-based sensitivity analysis. By decomposing the output variance using error propagation equations, this method can transform the "double-loop" sampling procedure into "single-loop" one and obviously reduce the computation cost of analysis. In contrast with Sobors and Fourier amplitude sensitivity test (FAST) method, which is limited in non-correlated variables, the new approach is suitable for correlated input variables. An application in semiconductor assembling and test manufacturing (ATM) factory indicates that this approach has a good performance in additive model and simple non-additive model.
出处 《Journal of Electronic Science and Technology of China》 2007年第3期278-282,共5页 中国电子科技(英文版)
关键词 Error propagation total sensitivity index variance-based sensitivity analysis. Error propagation, total sensitivity index, variance-based sensitivity analysis.
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