金属玻璃飞秒激光烧蚀特性

Ablation of Metallic Glasses by Femtosecond Laser Pulses

采用飞秒激光对Zr基金属玻璃在空气中进行了表面烧蚀、微打孔与微细切割等过程的研究.通过扫描电镜(SEM)、能量弥散X射线(EDX)能谱分析与透射电镜(TEM)及电子衍射等方法,分析了飞秒激光烧蚀金属玻璃的表面形貌与加工区域发生的相关效应.实验与分析表明加工区域周围无熔融和液滴溅射现象,热影响区极小,并且无晶化现象发生,但飞秒激光微细加工金属玻璃时存在极薄的表面氧化现象.研究结果表明,在适当选择参数的条件下,飞秒激光烧蚀是一种极有前途的金属玻璃无晶化微细加工方法.

Femtosecond laser ablation of Zr-based metallic glasses in air, including micro-drilling, trenching and cutting, has been investigated. The surface profile of the ablated glass and the associated effect in the ablation area were examined by means of scanning electron microscope （SEM）, energy dispersive X-ray （EDX） analysis, transmission electron microscope （TEM） and electron diffraction. These studies indicate that slight oxidation occurs at the machined region. Molten trace, spatter and crystallization are not found in the vicinity of machined area. The result shows that femtosecond laser ablation with selected parameters is a promising method for micromachining metal glasses without crystallization.