光纤Mach-Zehnder干涉仪臂长差的精确测量

Precise measurement on arm length differences of fiber optical Mach-Zehnder interferometer

提出了一种光纤Mach-Zehnder干涉仪臂长差的精确测量方法.理论分析表明,采用白光光纤Michleson解调干涉仪,白光干涉相邻峰值之间的距离为Mach-Zehnder干涉仪两臂光程差的一半.利用改进的干涉条纹观测系统和高精度的位移发生系统,提高了白光干涉峰值信号的识别精度,使Mach-Zehnder干涉仪臂长差的测量分辨率和精度分别达到了1μm和10μm.

This paper proposes a precise measurement Mach-Zehnder interferometer. The theoretical analysis lation interferometer, the distance between two ne the light length difference between the two arms igh of approach to arm length difference of fiber optical indicates that, with white-light Michleson demoduboring white-light interference peak is equal to half of the Mach-Zehnder interferometer. The identification precision of white-light interference （WLI）peak signal is raised by use of innovated interference fringe visuometer and high precision displacement generator. The measuring resolution of Mach-Zehnder interferometer and precision of two arms length difference reach to 1 μm and 10 μm, respectively.