摘要
光电位置敏感器件(PSD)是一种可直接对其光敏面上光斑位置进行检测的光电器件,基于光电位置敏感器件可以构成多种非接触的高精度动态位移监测仪器。介绍了位置敏感探测器(PSD)的工作原理及其性能,分析了PSD工作时杂散光对其测量的影响,提出其相应解决方案。
The position sensitive detector（PSD） is a photo-electronic sensor which can detect the position of a light spot traveling over its surface, and convert the position of light spot to simple electric signal. This article has studied the position-measuring principle based on PSD and the principle of PSD. The mixed ray affecting the precision of the measuring in the system are analyzed, and various kinds of solving methods are proposed.
出处
《机械管理开发》
2007年第5期10-11,共2页
Mechanical Management and Development
关键词
位置敏感探测器(PSD)
抗干扰
补偿
Photo-electric position sensitive detector（PSD）
Anti-interference
Compensation
