摘要
设计开发了一台微细电解加工装置。该装置采用龙门固定式结构,具有高精密的压电陶瓷微动工作台,可通过CCD观察整个加工过程;在宏微结合的驱动控制下,可进行各种微细孔、微细轴以及复杂微细结构的高精度微细电解加工。
A set of experimental equipment was developed for the purpose of three-dimensional electrochemical micromachining （EMM） research. In this setup, a stiff portal frame is adopted, piezoelectric ceramic micro-positioning worktable is employed, and the whole process can be observed by CCD device. Many EMM experiments, such as micro-hole, micro-shaft and micro-structure, were performed by macro/micro dual-drive control.
出处
《机床与液压》
北大核心
2007年第10期37-40,共4页
Machine Tool & Hydraulics
基金
广州市科技计划项目(2004Z3-D0051)
广东省科技计划项目(2005B10201016)
关键词
微细电解
宏微驱动
Electrochemical machining （EMM）
Macro/micro dual-drive
